- Flow-through chamber without dead space
- Easy rinsing of the media path
- Helium leak rate ≤ 10⁻⁹ mbar · l/s
- Electropolished case and chamber, Ra ≤ 0.25 μm
- Connections for ultra high purity gas systems
WIKA半導体および超高精細圧力測定
WIKAの圧力計器は、半導体および超高純度用途向けに、コンパクトダイヤフラムゲージ、フローゲージ、テストゲージ、EtherCAT圧力トランスデューサー、液体化学薬品用HYDRAシステムなどを取り揃えています。プロセス媒体と設置要件に応じて、モデル、接液部材質、接続方法をお選びください。WIKA製品は台湾国内でのみ販売されています。.
6件すべてを表示
Model: 432.25.2Flow-through diaphragm pressure gauge for UHP applications
Model: HYDRA-Gauge (HG)HYDRA ultra high purity pressure gauge for liquid chemicals
- Double-diaphragm isolation system
- PFA and mPTFE wetted components
- Stainless steel gauge with black Teflon coating
- 360° gauge rotation after installation
- Optional electronic alarm contacts
Model: HYDRA-Sensor (HS)HYDRA ultra high purity pressure transducer for liquid chemicals
- Double-diaphragm isolation system
- PFA and mPTFE wetted components
- 4 … 20 mA output, 2-wire system
- 360° transducer rotation after installation
- IP65 or IP67; optional attachable display
Model: 432.10, 432.15Mini diaphragm pressure gauge for UHP applications
- Compact diaphragm design for limited installation space
- Low internal volume helps reduce particle trapping
- Helium leak rate ≤ 10⁻⁹ mbar · l/s
- Electropolished measuring chamber and diaphragm surface, Ra < 0.25 μm
- 316L process connection with a metal seal and orbital-welded measuring chamber
Model: 332.54-UHPStainless steel Bourdon tube test pressure gauge, UHP version
- Stainless steel construction
- Removable bezel for service access
- Mirrored dial band and micrometer-adjustable pointer
- NIST-based calibration
- ASME oxygen-service cleaning
Model: WUD-20-E, WUD-25-E, WUD-26-EUltra high purity pressure transducer with display and EtherCAT
- EtherCAT interface using SDP 5003.2080
- Local pressure display and active temperature compensation
- Digital pressure, temperature and diagnostic data
- Firmware transfer and hot-swap support
- Two RJ45 ports for cable redundancy