- Flow-through chamber without dead space
- Easy rinsing of the media path
- Helium leak rate ≤ 10⁻⁹ mbar · l/s
- Electropolished case and chamber, Ra ≤ 0.25 μm
- Connections for ultra high purity gas systems
WIKA Semiconductor & UHP Pressure Measurement
WIKA pressure instruments for semiconductor and ultra high purity applications, including compact diaphragm gauges, flow-through gauges, test gauges, EtherCAT pressure transducers and HYDRA systems for liquid chemicals. Select the model, wetted materials and connection according to the process medium and installation requirements. WIKA products are sold in Taiwan only.
Showing all 6 results
Model: 432.25.2Flow-through diaphragm pressure gauge for UHP applications
Model: HYDRA-Gauge (HG)HYDRA ultra high purity pressure gauge for liquid chemicals
- Double-diaphragm isolation system
- PFA and mPTFE wetted components
- Stainless steel gauge with black Teflon coating
- 360° gauge rotation after installation
- Optional electronic alarm contacts
Model: HYDRA-Sensor (HS)HYDRA ultra high purity pressure transducer for liquid chemicals
- Double-diaphragm isolation system
- PFA and mPTFE wetted components
- 4 … 20 mA output, 2-wire system
- 360° transducer rotation after installation
- IP65 or IP67; optional attachable display
Model: 432.10, 432.15Mini diaphragm pressure gauge for UHP applications
- Compact diaphragm design for limited installation space
- Low internal volume helps reduce particle trapping
- Helium leak rate ≤ 10⁻⁹ mbar · l/s
- Electropolished measuring chamber and diaphragm surface, Ra < 0.25 μm
- 316L process connection with a metal seal and orbital-welded measuring chamber
Model: 332.54-UHPStainless steel Bourdon tube test pressure gauge, UHP version
- Stainless steel construction
- Removable bezel for service access
- Mirrored dial band and micrometer-adjustable pointer
- NIST-based calibration
- ASME oxygen-service cleaning
Model: WUD-20-E, WUD-25-E, WUD-26-EUltra high purity pressure transducer with display and EtherCAT
- EtherCAT interface using SDP 5003.2080
- Local pressure display and active temperature compensation
- Digital pressure, temperature and diagnostic data
- Firmware transfer and hot-swap support
- Two RJ45 ports for cable redundancy